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Selective Epitaxial Silicon and Selective Titanium Silicide in an Industrial Integrated Cluster Tool
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- Journal:
- MRS Online Proceedings Library Archive / Volume 342 / 1994
- Published online by Cambridge University Press:
- 22 February 2011, 249
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- 1994
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Raman Microprobe Analysis of Simox Structures Implanted With Screen Oxide
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- Journal:
- MRS Online Proceedings Library Archive / Volume 235 / 1991
- Published online by Cambridge University Press:
- 28 February 2011, 121
- Print publication:
- 1991
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High Temperature Annealing of Simox Layers Physical Mechanisms of Oxygen Segregation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 100 / 1988
- Published online by Cambridge University Press:
- 26 February 2011, 17
- Print publication:
- 1988
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High Temperature Annealing of Simox Layers Physical Mechanisms of Oxygen Segregation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 107 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 17
- Print publication:
- 1987
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